                                         
                          MOSIS PARAMETRIC TEST RESULTS
                                         
          RUN: T34B (LO_EPI)                                VENDOR: TSMC
   TECHNOLOGY: SCN018                                FEATURE SIZE: 0.18 microns


INTRODUCTION: This report contains the lot average results obtained by MOSIS
              from measurements of MOSIS test structures on each wafer of
              this fabrication lot. SPICE parameters obtained from similar
              measurements on a selected wafer are also attached.

COMMENTS: DSCN6M018_TSMC


TRANSISTOR PARAMETERS     W/L       N-CHANNEL P-CHANNEL  UNITS
                                                        
 MINIMUM                  0.27/0.18                     
  Vth                                    0.52     -0.52  volts
                                                        
 SHORT                    20.0/0.18                     
  Idss                                 531      -282     uA/um
  Vth                                    0.52     -0.51  volts
  Vpt                                    4.6      -5.4   volts
                                                        
 WIDE                     20.0/0.18                     
  Ids0                                  18.3     -15.9   pA/um
                                                        
 LARGE                    50/50                         
  Vth                                    0.43     -0.42  volts
  Vjbkd                                  3.1      -4.0   volts
  Ijlk                                 <50.0     <50.0   pA
  Gamma                                  0.52      0.62  V^0.5
                                                        
 K' (Uo*Cox/2)                         167.5     -35.4   uA/V^2
 Low-field Mobility                    397.76     84.06  cm^2/V*s
                                                        
COMMENTS: Poly bias varies with design technology. To account for mask and
           etch bias use the appropriate value for the parameters XL and XW
           in your SPICE model card.
                       Design Technology                   XL        XW
                       -----------------                   -------  ------
                       SCN6M_DEEP (lambda=0.09)            -0.02    -0.01
                                     thick oxide           -0.03    -0.01
                       TSMC18                              -0.02     0.00
                                     thick oxide           -0.02     0.00
                       SCN6M_SUBM (lambda=0.10)            -0.04     0.00
                                     thick oxide           -0.07     0.00


FOX TRANSISTORS           GATE      N+ACTIVE  P+ACTIVE  UNITS
 Vth                      Poly         >6.6     <-6.6   volts



PROCESS PARAMETERS     N+    P+    POLY  N+BLK  PLY+BLK   MTL1   MTL2  UNITS
 Sheet Resistance       6.0   6.8  6.9    61.1   325.1    0.08   0.08  ohms/sq
 Contact Resistance     9.5   9.9  8.8                           4.92  ohms
 Gate Oxide Thickness  41                                              angstrom
                                  

PROCESS PARAMETERS    MTL3  POLY_HRI    MTL4    MTL5     MTL6   N_W     UNITS
 Sheet Resistance     0.08   1512.2     0.08    0.07     0.03    917    ohms/sq
 Contact Resistance   9.06             13.86   18.12    19.85           ohms
                                                                       
COMMENTS: BLK is silicide block.


CAPACITANCE PARAMETERS  N+   P+  POLY M1 M2 M3 M4  M5  M6  D_N_W  N_W   UNITS
 Area (substrate)      971 1149  107  40 19 13  8   8   3          128  aF/um^2
 Area (N+active)                8470  56 21 14 11   9   8               aF/um^2
 Area (P+active)                8242                                    aF/um^2
 Area (poly)                          66 17 10  7   5   4               aF/um^2
 Area (metal1)                           40 15  9   6   5               aF/um^2
 Area (metal2)                              38 14   9   6               aF/um^2
 Area (metal3)                                 39  15   9               aF/um^2
 Area (metal4)                                     39  14               aF/um^2
 Area (metal5)                                         36               aF/um^2
 Area (r well)         992                                              aF/um^2
 Area (no well)        146                                              aF/um^2
 Fringe (substrate)    240  214       16 59 54 41  24  43               aF/um
 Fringe (poly)                        59 39 29 23  20  17               aF/um
 Fringe (metal1)                         51 33     22  19               aF/um
 Fringe (metal2)                            44 35  27  23               aF/um
 Fringe (metal3)                               53  35  28               aF/um
 Fringe (metal4)                                   55  35               aF/um
 Fringe (metal5)                                       54               aF/um
 Overlap (N+active)              827                                    aF/um
 Overlap (P+active)              723                                    aF/um
                                                                       


CIRCUIT PARAMETERS                            UNITS      
 Inverters                     K                         
  Vinv                        1.0       0.76  volts      
  Vinv                        1.5       0.80  volts      
  Vol (100 uA)                2.0       0.08  volts      
  Voh (100 uA)                2.0       1.65  volts      
  Vinv                        2.0       0.83  volts      
  Gain                        2.0     -22.16             
 Ring Oscillator Freq.                                   
  D1024_THK (31-stg,3.3V)             312.44  MHz        
  DIV1024 (31-stg,1.8V)               381.46  MHz        
 Ring Oscillator Power                                   
  D1024_THK (31-stg,3.3V)               0.07  uW/MHz/gate
  DIV1024 (31-stg,1.8V)                 0.02  uW/MHz/gate
                                                         
COMMENTS: DEEP_SUBMICRON




T34B SPICE BSIM3 VERSION 3.1 PARAMETERS

SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8

* DATE: Jun 12/03
* LOT: T34B                  WAF: 1001
* Temperature_parameters=Default
.MODEL CMOSN NMOS (                                 LEVEL   = 49
+VERSION = 3.1            TNOM    = 27             TOX     = 4.1E-9
+XJ      = 1E-7           NCH     = 2.3549E17      VTH0    = 0.369274
+K1      = 0.5929964      K2      = 2.56208E-3     K3      = 1E-3
+K3B     = 4.1710049      W0      = 1E-7           NLX     = 1.777008E-7
+DVT0W   = 0              DVT1W   = 0              DVT2W   = 0
+DVT0    = 1.3217693      DVT1    = 0.3801036      DVT2    = 0.0721613
+U0      = 266.8119427    UA      = -1.335767E-9   UB      = 2.26484E-18
+UC      = 5.518347E-11   VSAT    = 1.037817E5     A0      = 2
+AGS     = 0.4244848      B0      = -1.225288E-9   B1      = -1E-7
+KETA    = -0.0125006     A1      = 0              A2      = 1
+RDSW    = 150            PRWG    = 0.5            PRWB    = -0.2
+WR      = 1              WINT    = 0              LINT    = 9.085457E-9
+XL      = -2E-8          XW      = -1E-8          DWG     = -1.271491E-8
+DWB     = 2.116877E-8    VOFF    = -0.091545      NFACTOR = 2.3984498
+CIT     = 0              CDSC    = 2.4E-4         CDSCD   = 0
+CDSCB   = 0              ETA0    = 3.173064E-3    ETAB    = 1.020995E-4
+DSUB    = 7.450962E-3    PCLM    = 0.7367015      PDIBLC1 = 0.198144
+PDIBLC2 = 2.03593E-3     PDIBLCB = -0.1           DROUT   = 0.8737246
+PSCBE1  = 1.737126E9     PSCBE2  = 4.248281E-9    PVAG    = 3.971571E-3
+DELTA   = 0.01           RSH     = 6              MOBMOD  = 1
+PRT     = 0              UTE     = -1.5           KT1     = -0.11
+KT1L    = 0              KT2     = 0.022          UA1     = 4.31E-9
+UB1     = -7.61E-18      UC1     = -5.6E-11       AT      = 3.3E4
+WL      = 0              WLN     = 1              WW      = 0
+WWN     = 1              WWL     = 0              LL      = 0
+LLN     = 1              LW      = 0              LWN     = 1
+LWL     = 0              CAPMOD  = 2              XPART   = 0.5
+CGDO    = 8.27E-10       CGSO    = 8.27E-10       CGBO    = 1E-12
+CJ      = 9.687641E-4    PB      = 0.8            MJ      = 0.3863354
+CJSW    = 2.247503E-10   PBSW    = 0.8            MJSW    = 0.1137242
+CJSWG   = 3.3E-10        PBSWG   = 0.8            MJSWG   = 0.1137242
+CF      = 0              PVTH0   = 4.933396E-4    PRDSW   = -4.9132098
+PK2     = -3.021671E-4   WKETA   = 4.250657E-3    LKETA   = -6.344078E-3
+PU0     = 17.7324534     PUA     = 6.822465E-11   PUB     = 4.983313E-24
+PVSAT   = 1.283581E3     PETA0   = 1.003159E-4    PKETA   = -1.740195E-3    )
*
.MODEL CMOSP PMOS (                                LEVEL   = 49
+VERSION = 3.1            TNOM    = 27             TOX     = 4.1E-9
+XJ      = 1E-7           NCH     = 4.1589E17      VTH0    = -0.3982542
+K1      = 0.5786084      K2      = 0.0278094      K3      = 0
+K3B     = 10.3659708     W0      = 1E-6           NLX     = 1.026246E-7
+DVT0W   = 0              DVT1W   = 0              DVT2W   = 0
+DVT0    = 0.7057743      DVT1    = 0.2984169      DVT2    = 0.1
+U0      = 117.2186562    UA      = 1.599574E-9    UB      = 1.173619E-21
+UC      = -1E-10         VSAT    = 2E5            A0      = 1.8823038
+AGS     = 0.4244693      B0      = 6.679798E-7    B1      = 1.191517E-6
+KETA    = 0.011463       A1      = 0.2513691      A2      = 0.3
+RDSW    = 302.1804189    PRWG    = 0.5            PRWB    = 0.0328618
+WR      = 1              WINT    = 0              LINT    = 2.08618E-8
+XL      = -2E-8          XW      = -1E-8          DWG     = -5.532881E-8
+DWB     = 1.341684E-8    VOFF    = -0.0987267     NFACTOR = 2
+CIT     = 0              CDSC    = 2.4E-4         CDSCD   = 0
+CDSCB   = 0              ETA0    = 0.1037341      ETAB    = -0.0697091
+DSUB    = 0.9270483      PCLM    = 1.5376372      PDIBLC1 = 2.476707E-4
+PDIBLC2 = 0.0130538      PDIBLCB = -1E-3          DROUT   = 1.122739E-4
+PSCBE1  = 9.006408E9     PSCBE2  = 2.601262E-9    PVAG    = 7.3226537
+DELTA   = 0.01           RSH     = 6.8            MOBMOD  = 1
+PRT     = 0              UTE     = -1.5           KT1     = -0.11
+KT1L    = 0              KT2     = 0.022          UA1     = 4.31E-9
+UB1     = -7.61E-18      UC1     = -5.6E-11       AT      = 3.3E4
+WL      = 0              WLN     = 1              WW      = 0
+WWN     = 1              WWL     = 0              LL      = 0
+LLN     = 1              LW      = 0              LWN     = 1
+LWL     = 0              CAPMOD  = 2              XPART   = 0.5
+CGDO    = 7.23E-10       CGSO    = 7.23E-10       CGBO    = 1E-12
+CJ      = 1.142102E-3    PB      = 0.8431362      MJ      = 0.4095354
+CJSW    = 1.983122E-10   PBSW    = 0.8            MJSW    = 0.3174491
+CJSWG   = 4.22E-10       PBSWG   = 0.8            MJSWG   = 0.3174491
+CF      = 0              PVTH0   = 1.053601E-3    PRDSW   = 0.5107185
+PK2     = 1.458923E-3    WKETA   = 0.0266509      LKETA   = -2.397234E-3
+PU0     = -1.7320449     PUA     = -6.6036E-11    PUB     = 1E-21
+PVSAT   = -50            PETA0   = 1.003159E-4    PKETA   = -2.79664E-3     )
*

